TY  - CONF
AU  - Dowell, Marla L.
AU  - Brown, Hannah
AU  - Greene, Gretchen
AU  - Hale, Paul D.
AU  - Hoskins, Brian
AU  - Hughes, Sarah
AU  - Keller, Bob R.
AU  - Kline, R Joseph
AU  - Lau, June W.
AU  - Shainline, Jeff
C2  - E.M. Secula and J. A. Liddle, Frontiers of Characterization and Metrology for Nanoelectronics: 2024, Monterey, CA, US
DA  - 2024-02-13 14:02:18
LA  - en
PB  - E.M. Secula and J. A. Liddle, Frontiers of Characterization and Metrology for Nanoelectronics: 2024, Monterey, CA, US
PY  - 2024
TI  - Advancing Measurement Science for Microelectronics: CHIPS R&D Metrology Program
ER  -