TY  - JOUR
AU  - Hyett, Geoffrey
AU  - Green, Mark
AU  - Parkin, Ivan
C2  - Chemical Vapor Deposition
DA  - 2008-09-30 04:09:00
DO  - https://doi.org/10.1002/cvde.200806705
LA  - en
M1  - 14
PB  - Chemical Vapor Deposition
PY  - 2008
TI  - An Investigation of Titanium-Vanadium Nitride Phase Space, Conducted Using Combinatorial Atmospheric Pressure CVD
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=610057
ER  -