TY  - JOUR
AU  - Germer, Thomas A.
AU  - Renegar, Thomas Brian
AU  - Griesmann, Ulf
AU  - Soons, Johannes A.
C2  - Surface Topography: Metrology and Properties
DA  - 2024-05-08 04:05:00
DO  - https://doi.org/10.1088/2051-672X/ad44bb
LA  - en
M1  - 12
PB  - Surface Topography: Metrology and Properties
PY  - 2024
TI  - Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=956762
ER  -