TY  - CONF
AU  - Tsai, Benjamin
AU  - Lovas, Francis
AU  - DeWitt, D
AU  - Kreider, K
AU  - Burns, G
AU  - Allen, David
C2  - 5th International Conference of Advanced Thermal Processing of Semiconductors: RTP''97 , New Orleans, LA
DA  - 1997-01-01
LA  - en
PB  - 5th International Conference of Advanced Thermal Processing of Semiconductors: RTP''97 , New Orleans, LA
PY  - 1997
TI  - In-Chamber Thermometry Calibration using a Silicon Proof-Wafer
ER  -