TY  - GEN
AU  - Wallace, Jay
AU  - Lum, Lin-Sien
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1996-12-01 05:12:00
DO  - https://doi.org/10.6028/NIST.IR.5903
LA  - en
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1996
TI  - Mechanical Properties of Aluminum Nitride Substrates
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=850249
ER  -