TY  - JOUR
AU  - Patrick, Heather
AU  - Attota, R
AU  - Germer, Thomas
AU  - Stocker, M
AU  - Silver, R
C2  - Metrology Pages Inspection Pages and Process Control for Microlithography XX SPIE
DA  - 2006-01-01
LA  - en
M1  - 6152
PB  - Metrology Pages Inspection Pages and Process Control for Microlithography XX SPIE
PY  - 2006
TI  - Scatterfield microscopy using conventional and back focal plane imaging with an engineered illumination field, ed. by C.N. Archie
ER  -