TY  - JOUR
AU  - Seung, 
AU  - Yong, 
AU  - Yoo, Jae
AU  - Dagalakis, Nicholas
C2  - Applied Physics Letters
DA  - 2012-12-03
LA  - en
PB  - Applied Physics Letters
PY  - 2012
TI  - Microelectromechanical systems based Stewart platform with sub-nano resolution
ER  -