TY  - JOUR
AU  - Seung, 
AU  - Yong, 
AU  - Kavuri, Premsagar
AU  - Yoo, Jae
AU  - Choi, Young
AU  - Dagalakis, Nicholas
C2  - Sensors and Actuators A: Physical
DA  - 2010-08-19
LA  - en
M1  - 163
PB  - Sensors and Actuators A: Physical
PY  - 2010
TI  - AFM characterization of nanopositioner in-plane stiffnesses
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906223
ER  -