TY  - CONF
AU  - Lovas, Francis
AU  - Tsai, Benjamin
AU  - Gibson, Charles
C2  - Rapid Thermal and Integrated Processing. VII , San Francisco, CA
DA  - 1998-01-01
LA  - en
M1  - 525
PB  - Rapid Thermal and Integrated Processing. VII , San Francisco, CA
PY  - 1998
TI  - Meeting RTP Temperature Accuracy Requirements: Measurement and Calibrations at NIST, ed. by M.C. Ozturk, F. Roozeboom, P.J. Timans, and S.H. Pas
ER  -