TY  - GEN
AU  - Bittman, Sidney
AU  - Lau, June W.
AU  - Greene, Gretchen
C2  - OTHER, National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2024-08-23 04:08:00
DO  - https://doi.org/10.6028/NIST.CHIPS.1100-1
LA  - en
PB  - OTHER, National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2024
TI  - Response to Public Comments: Building a Metrology Exchange to Innovate in Semiconductors (METIS)
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=957941
ER  -