TY  - JOUR
AU  - Moffat, Thomas P.
AU  - Braun, Trevor
AU  - Raciti, David
AU  - Josell, Daniel
C2  - Accounts of Chemical Research
DA  - 2023-04-20 04:04:00
LA  - en
PB  - Accounts of Chemical Research
PY  - 2023
TI  - Superconformal Film Growth: From Smoothing Surfaces to Interconnect Technology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=936061
ER  -