TY  - JOUR
AU  - Germer, Thomas
C2  - Applied Optics
DA  - 1997-01-01
LA  - en
M1  - 36
PB  - Applied Optics
PY  - 1997
TI  - Angular Dependence and Polarization of Out-of-plane Optical Scattering from Particulate Contamination, Subsurface Defects, and Surface Microroughness
ER  -