TY  - JOUR
AU  - Germer, Thomas
AU  - Seiler, D
AU  - Bullis, W
AU  - Diebold, A
AU  - Mcdonald, R
AU  - Shaffner, T
C2  - Characterization and Metrology for ULSI Technology
DA  - 1998-01-01
LA  - en
M1  - 449
PB  - Characterization and Metrology for ULSI Technology
PY  - 1998
TI  - Polarized Light Scattering and its Application to Microroughness, Particle, and Defect Detection
ER  -