TY  - JOUR
AU  - Germer, Thomas
C2  - SPIE
DA  - 1998-01-01
LA  - en
M1  - 3275
PB  - SPIE
PY  - 1998
TI  - Application of bidirectional ellipsometry to the characterization of roughness and defects in dielectric layers, ed. by J. C. Stover
ER  -