TY  - JOUR
AU  - Germer, Thomas
AU  - Asmail, Clara
C2  - Review of Scientific Instruments
DA  - 1999-01-01
LA  - en
M1  - 70
PB  - Review of Scientific Instruments
PY  - 1999
TI  - Goniometric Optical Scatter Instrument for Out-of-Plane Ellipsometry Measurements
ER  -