TY  - CONF
AU  - Germer, Thomas
C2  - Characterization and Metrology for ULSI Technology: 2000 International Conference, Gaithersburg, WA
DA  - 2001-01-01
LA  - en
PB  - Characterization and Metrology for ULSI Technology: 2000 International Conference, Gaithersburg, WA
PY  - 2001
TI  - Characterizing Interfacial Roughness by Light Scattering Ellipsometry, ed. by D.G. Seiler, A.C. Diebold, T.J. Shaffner, R. McDonald, W.M. Bullis, P.J. Smith, and E.M. Secula
ER  -