TY  - CONF
AU  - Germer, Thomas
AU  - Mulholland, G
AU  - Kim, J
AU  - Ehrman, S
C2  - Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components, Seattle, WA
DA  - 2002-01-01
LA  - en
PB  - Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components, Seattle, WA
PY  - 2002
TI  - Measurement of the 100 nm NIST SRM® 1963 by Laser Surface Light Scattering, ed. by A Duparr {?} and B. Singh
ER  -