TY  - CONF
AU  - Germer, Thomas
AU  - Fasolka, M
C2  - Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies , San Diego, CA
DA  - 2003-01-01
LA  - en
PB  - Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies , San Diego, CA
PY  - 2003
TI  - Characterizing Surface Roughness of Thin Films By Polarized Light Scattering, ed. by A. Duparr {?} and B. Singh
ER  -