TY  - CONF
AU  - Moffitt, Stephanie
AU  - Barnes, Bryan
AU  - Germer, Thomas A.
AU  - Grantham, Steven
AU  - Shirley, Eric
AU  - Sohn, Martin
AU  - Sunday, Daniel
AU  - Tarrio, Charles S.
C2  - International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Monterey, CA, US
DA  - 2024-04-24 04:04:00
LA  - en
PB  - International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Monterey, CA, US
PY  - 2024
TI  - Instrument Development for Spectroscopic Ellipsometry and Diffractometry in the EUV
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=957261
ER  -