TY  - CONF
AU  - Rahman, M. Wahidur
AU  - Vogl, Gregory W.
AU  - Jia, Xiaodong
AU  - Qu, Yongzhi
C2  - Proceedings of the 2024 IEEE International Conference on Prognostics and Health Management (ICPHM), Spokane, WA, US
DA  - 2024-08-13 04:08:00
DO  - https://doi.org/10.1109/ICPHM61352.2024.10627679
LA  - en
PB  - Proceedings of the 2024 IEEE International Conference on Prognostics and Health Management (ICPHM), Spokane, WA, US
PY  - 2024
TI  - Physics-Informed Multi-Task Learning for Material Removal Rate Prediction in Semiconductor Chemical Mechanical Planarization
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=957637
ER  -