TY - GEN AU - Datla, Raju AU - Ebner, S AU - Proctor, J AU - Parr, Albert C2 - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD DA - 1991-01-01 LA - en PB - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD PY - 1991 TI - NIST - LBIR Facility Handbook ER -