TY - CONF AU - Secula, Erik AU - Liddle, James C2 - Frontiers of Characterization and Metrology for Nanoelectronics: 2022, Monterey, CA, US DA - 2024-12-05 12:12:56 LA - en PB - Frontiers of Characterization and Metrology for Nanoelectronics: 2022, Monterey, CA, US PY - 2024 TI - Frontiers of Characterization and Metrology for Nanoelectronics: 2022 ER -