TY - CONF AU - Barrera, Nikolas Dale AU - Pawlik, Jacob AU - Yoon, Eugene AU - Booth, James AU - Long, Christian AU - Orloff, Nathan AU - Meng, Ellis AU - Stelson, Angela C2 - 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Kyoto, JP DA - 2023-06-29 04:06:00 LA - en PB - 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Kyoto, JP PY - 2023 TI - Microwave Characterization of Parylene C Dielectric and Barrier Properties UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=936402 ER -