TY  - JOUR
AU  - Pope, Jodie Gail
AU  - Gillis, Keith A.
AU  - Johnson, Aaron
AU  - Boyd, Joey
AU  - Wright, John
C2  - Flow Measurement and Instrumentation
DA  - 2025-03-01 05:03:00
DO  - https://doi.org/10.1016/j.flowmeasinst.2025.102831
LA  - en
PB  - Flow Measurement and Instrumentation
PY  - 2025
TI  - SLowFlowS: A novel flow standard for semiconductor process gases
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=958370
ER  -