TY  - JOUR
AU  - Diulus, John
AU  - Roca, Carles Corbella
AU  - Yi, Feng
AU  - LaVan, David
AU  - Kalanyan, Berc
AU  - McLean, Mark
AU  - Narayan, Lakshmi Ravi
AU  - Osborn, William
AU  - Maslar, James
AU  - Kolmakov, Andrei
C2  - Journal of Vacuum Science & Technology A
DA  - 2025-02-04 05:02:00
DO  - https://doi.org/10.1116/6.0004294
LA  - en
M1  - 43
PB  - Journal of Vacuum Science & Technology A
PY  - 2025
TI  - Nanocalorimetry for plasma metrology relevant to semiconductor fabrication
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=958828
ER  -