TY  - CONF
AU  - Feng, Shaw
AU  - Joung, Che
AU  - Vorburger, Theodore
C2  - Scanning 2008, Gaithersburg, MD
DA  - 2008-03-17
LA  - en
PB  - Scanning 2008, Gaithersburg, MD
PY  - 2008
TI  - A Characterization of Probe Dynamic Behaviors in Critical Dimension Atomic Force Microscopy
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=824625
ER  -