TY  - JOUR
AU  - Nguyen, Nhan
AU  - Sayan, Safak
AU  - Levin, Igor
AU  - Ehrstein, James
AU  - Baumvol, I.J.R.
AU  - Driemeier, C.
AU  - Wielunski, L
AU  - Hung, Pui-Yee
AU  - Diebold, Alain
C2  - Journal of Vacuum Science and Technology A
DA  - 2005-11-17
LA  - en
M1  - 23
PB  - Journal of Vacuum Science and Technology A
PY  - 2005
TI  - Optical Bandgaps and Composition Dependence of Hafnium Aluminate Thin Films grown by Atomic Layer Chemical Vapor Deposition
ER  -