TY  - CONF
AU  - Park, Seong-Eun
AU  - Nguyen, Nhan
AU  - Kopanski, Joseph
AU  - Suehle, John
AU  - Vogel, Eric
C2  - Ultra Shallow Junction 2005, Daytona Beach, FL
DA  - 2006-02-01
LA  - en
M1  - 24
PB  - Ultra Shallow Junction 2005, Daytona Beach, FL
PY  - 2006
TI  - Comparison of scanning capacitance microscopy and scanning Kelvin probe microscopy in determining two-dimensional doping profiles of Si homostructures
ER  -