TY  - ICOMM
AU  - Benck, Eric
AU  - Roberts, J
C1  - http://www.vacuum.org/NCCAVS/JUL98_4.PDF
C2  - http://www.vacuum.org/NCCAVS/JUL98_4.PDF
DA  - 1998-01-01
LA  - en
PB  - http://www.vacuum.org/NCCAVS/JUL98_4.PDF
PY  - 1998
TI  - Optical computer aided tomography for plasma uniformity measurements
ER  -