TY  - JOUR
AU  - Schwabedissen, A
AU  - Benck, Eric
AU  - Roberts, J
C2  - Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
DA  - 1997-01-01
LA  - en
M1  - 56
PB  - Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
PY  - 1997
TI  - The Influence of Different Coil Geometries on the Spatial Distribution of the Plasma Density in Planar Inductively Coupled Plasmas
ER  -