TY  - SER
AU  - Pomeroy, Joshua
AU  - Ratliff, L
AU  - Gillaspy, John
AU  - Bajt, Sasa
C2  -  SPIE Press , Bellingham, WA
DA  - 2006-01-01
LA  - en
PB  -  SPIE Press , Bellingham, WA
PY  - 2006
TI  - Potential Energy Sputtering of EUVL Materials, ed. by V. Bakshi
ER  -