TY  - JOUR
AU  - Burnett, John
AU  - Gupta, R
AU  - And, U
C2  - Optical Microlithography XIII Proc SPIE 4000
DA  - 2000-01-01
LA  - en
M1  - 4000
PB  - Optical Microlithography XIII Proc SPIE 4000
PY  - 2000
TI  - Absolute index of refraction and its temperature dependence of calcium fluoride, barium fluoride, and strontium fluoride near 157 nm, ed. by C.H. Progler
ER  -