TY  - SER
AU  - Burnett, John
AU  - Levine, Zachary
AU  - And, E
C2  -  Technology Publishing Ltd , London, 
DA  - 2002-01-01
LA  - en
PB  -  Technology Publishing Ltd , London, 
PY  - 2002
TI  - Intrinsic Birefringence in Crystalline Optical Materials: A New Concern for Lithography
ER  -