TY  - JOUR
AU  - Burnett, John
AU  - Kaplan, Simon
C2  - Optical Microlithography XVI
DA  - 2003-01-01
LA  - en
PB  - Optical Microlithography XVI
PY  - 2003
TI  - Measurement of the refractive index and thermo-optic coefficient of water near 193 nm, ed. by Anthony Yen Page
ER  -