TY - JOUR AU - Watts, R AU - Tarrio, Charles AU - Lucatorto, Thomas AU - Madden, R AU - Deslattes, R AU - Caticha, Estler AU - Evans, C AU - Mcwaid, T AU - Fu, Jing AU - Vorburger, T C2 - Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms DA - 1993-01-01 LA - en M1 - 79 PB - Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms PY - 1993 TI - XUV Optics Characterization at NIST ER -