TY - JOUR AU - Schwabedissen, A AU - Benck, Eric AU - Roberts, J C2 - Physical Review E (Statistical, Nonlinear, and Soft Matter Physics) DA - 1997-01-01 LA - en M1 - 55 PB - Physical Review E (Statistical, Nonlinear, and Soft Matter Physics) PY - 1997 TI - Langmuir Probe Measurements in an Inductively Coupled Plasma Source ER -