TY - JOUR AU - Dzierzega, Krzysztof AU - Musiol, K AU - Benck, Eric AU - Roberts, J C2 - Journal of Applied Physics DA - 1996-01-01 LA - en M1 - 80 PB - Journal of Applied Physics PY - 1996 TI - Electron Density Measurement in a rf Helium Plasma by Laser-Collision Induced Fluorescence Method ER -