TY  - SER
AU  - Bridges, John
AU  - Hardis, Jonathan
AU  - Cromer, C
AU  - Roberts, J
C2  -   AIP, New York, NY
DA  - 1996-01-01
LA  - en
PB  -   AIP, New York, NY
PY  - 1996
TI  - Spectroradiometers for Deep-Ultraviolet Lithography, ed. by W.M. Bullis, D.G. Seiler, and A.C. Diebold
ER  -