TY  - JOUR
AU  - Benck, Eric
AU  - Schwabedissen, A
AU  - Gates, A.
AU  - Roberts, J
C2  - Journal of Vacuum Science and Technology A
DA  - 1998-01-01
LA  - en
M1  - 16
PB  - Journal of Vacuum Science and Technology A
PY  - 1998
TI  - Investigations in the Sheath Region of a Radio Frequency Biased Inductively Coupled Discharge
ER  -