TY  - CONF
AU  - Benck, Eric
AU  - Roberts, J
C2  - Characterization and Metrology for ULSI Technology: 1998 International Conference, Gaithersburg, MD
DA  - 1998-03-01
LA  - en
M1  - 449
PB  - Characterization and Metrology for ULSI Technology: 1998 International Conference, Gaithersburg, MD
PY  - 1998
TI  - Optical computer aided tomography measurements of plasma uniformity in an inductively coupled discharge, ed. by Seiler, D.G., Diebold, A.C., Bullis, W.M., Shaffner, T.J., McDonald, R., and Walters, E.J.
ER  -