TY  - CONF
AU  - Benck, Eric
AU  - Golubiatnikov, G
AU  - Fraser, Gerald
AU  - Pluesquelic, D
AU  - Ji, B
AU  - Motika, S
AU  - Karwacki, E
C2  - Characterization and Metrology for ULSI Technology: 2003 International Conference, Austin, TX
DA  - 2003-03-01
LA  - en
M1  - C
PB  - Characterization and Metrology for ULSI Technology: 2003 International Conference, Austin, TX
PY  - 2003
TI  - Submillimeter-Wavelength Plasma Diagnostics For Semiconductor Manufacturing, ed. by D.G. Seiler, A.C. Diebold, T.J. Schaffner, R. McDonald, S. Zollner, R.P. Khosla, and E.M. Secula
ER  -