TY  - JOUR
AU  - Tarrio, Charles
AU  - Grantham, Steven
AU  - Squires, M
AU  - Vest, Robert
AU  - Lucatorto, Thomas
C2  - Journal of Research of the National Institute of Standards and Technology
DA  - 2003-01-01
LA  - en
M1  - 108
PB  - Journal of Research of the National Institute of Standards and Technology
PY  - 2003
TI  - Towards high accuracy reflectometry for extreme-ultraviolet lithography,
ER  -