TY  - JOUR
AU  - Tarrio, Charles
AU  - Watts, R
AU  - Lucatorto, Thomas
AU  - Slaughter, J
AU  - Falco, C
C2  - Applied Optics
DA  - 1998-01-01
LA  - en
M1  - 37
PB  - Applied Optics
PY  - 1998
TI  - Optical Constants of In-Situ Deposited Films of Important EUV Multilayer Materials,
ER  -