TY  - JOUR
AU  - Levine, Zachary
AU  - Gao, J
AU  - Neogi, S
AU  - Levin, T
AU  - Scott, J
AU  - Grantham, Steven
C2  - Journal of Applied Physics
DA  - 2003-01-01
LA  - en
M1  - 93
PB  - Journal of Applied Physics
PY  - 2003
TI  - Parallax measurements of integrated circuit interconnects using a scanning transmission electron microscope
ER  -