TY  - CONF
AU  - Babushok, Valeri
AU  - Tsang, Wing
AU  - Zachariah, R
C2  - 1st International Symposium on Environmental Issues with Materials and Processes for the Electronic and Semiconductor Industries, Pennington, NJ
DA  - 1999-12-01
LA  - en
PB  - 1st International Symposium on Environmental Issues with Materials and Processes for the Electronic and Semiconductor Industries, Pennington, NJ
PY  - 1999
TI  - Inhibiting Silane Pyrophoricity
ER  -