TY  - CONF
AU  - Powell, Cedric
AU  - Rumble, J
AU  - J, R
AU  - Blakeslee, D
AU  - Dal-favero, M
AU  - Jablonski, Aleksander
AU  - Tougaard, Sven
C2  - 1998 International Conference in Characterization and Metrology, PA
DA  - 1998-12-01
LA  - en
PB  - 1998 International Conference in Characterization and Metrology, PA
PY  - 1998
TI  - The NIST Surface Analysis Data Center
ER  -