TY  - CONF
AU  - Myers, Alline
AU  - Steel, Eric
AU  - Struck, L
AU  - Liu, H
AU  - Burns, J
C2  - Characterization and Metrology for ULSI Technology, PA
DA  - 1998-12-01
LA  - en
PB  - Characterization and Metrology for ULSI Technology, PA
PY  - 1998
TI  - Transmission Electron Microscopy Investigation of Titanium Silicide Thin Films
ER  -