TY  - CONF
AU  - Hendricks, Jay
AU  - Zachariah, Michael
C2  - Electrochemical Society Meeting, CO
DA  - 1998-12-01
LA  - en
PB  - Electrochemical Society Meeting, CO
PY  - 1998
TI  - Chemical Vapor Deposition of Metal and Ceramic Thin Films by Sodium Vapor Phase Reduction of Metal Halide Precursors
ER  -