TY  - JOUR
AU  - Yong, 
AU  - Yoo, Jae
AU  - Seung, 
AU  - Choi, Young
AU  - Dagalakis, Nicholas
AU  - Gupta, Satyandra
C2  - Journal of Micromechanic and Microengineering
DA  - 2012-08-29
LA  - en
M1  - 22
PB  - Journal of Micromechanic and Microengineering
PY  - 2012
TI  - Design, fabrication, and testing of a serial kinematic MEMS XY stage for multi-finger manipulation
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911710
ER  -