TY  - SER
AU  - Watts, R
AU  - Ederer, D
AU  - Lucatorto, Thomas
AU  - Isaacson, M
C2  - Optical Society of America, Washington, DC
DA  - 1991-01-01
LA  - en
PB  - Optical Society of America, Washington, DC
PY  - 1991
TI  - National Institute of Standards and Technology Metrology for Soft-X-Ray Multilayer Optics,
ER  -